JPS63100149A - 蒸着用Ｆｅ−Ｃｏ基合金 - Google Patents
蒸着用Ｆｅ−Ｃｏ基合金Info
- Publication number
- JPS63100149A JPS63100149A JP24362986A JP24362986A JPS63100149A JP S63100149 A JPS63100149 A JP S63100149A JP 24362986 A JP24362986 A JP 24362986A JP 24362986 A JP24362986 A JP 24362986A JP S63100149 A JPS63100149 A JP S63100149A
- Authority
- JP
- Japan
- Prior art keywords
- less
- vapor deposition
- alloy
- thin film
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000956 alloy Substances 0.000 title claims abstract description 66
- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 64
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 38
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 11
- 229910017061 Fe Co Inorganic materials 0.000 claims description 14
- 239000010409 thin film Substances 0.000 abstract description 28
- 230000005291 magnetic effect Effects 0.000 abstract description 19
- 239000000463 material Substances 0.000 abstract description 13
- 239000012535 impurity Substances 0.000 abstract description 9
- 239000000203 mixture Substances 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 229910052759 nickel Inorganic materials 0.000 abstract description 3
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 3
- 229910052760 oxygen Inorganic materials 0.000 abstract description 3
- 238000005247 gettering Methods 0.000 abstract description 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 22
- 239000000292 calcium oxide Substances 0.000 description 22
- 235000012255 calcium oxide Nutrition 0.000 description 22
- 230000000694 effects Effects 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 15
- 238000004544 sputter deposition Methods 0.000 description 15
- 239000002184 metal Substances 0.000 description 14
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 11
- 238000000151 deposition Methods 0.000 description 10
- 230000008021 deposition Effects 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 239000011819 refractory material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 229910017112 Fe—C Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910001004 magnetic alloy Inorganic materials 0.000 description 3
- 230000001603 reducing effect Effects 0.000 description 3
- 239000006104 solid solution Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000005275 alloying Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- JHLNERQLKQQLRZ-UHFFFAOYSA-N calcium silicate Chemical compound [Ca+2].[Ca+2].[O-][Si]([O-])([O-])[O-] JHLNERQLKQQLRZ-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 229910000514 dolomite Inorganic materials 0.000 description 1
- 239000010459 dolomite Substances 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- -1 etc. Substances 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24362986A JPS63100149A (ja) | 1986-10-14 | 1986-10-14 | 蒸着用Ｆｅ−Ｃｏ基合金 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24362986A JPS63100149A (ja) | 1986-10-14 | 1986-10-14 | 蒸着用Ｆｅ−Ｃｏ基合金 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63100149A true JPS63100149A (ja) | 1988-05-02 |
| JPH0430451B2 JPH0430451B2 (en]) | 1992-05-21 |
Family
ID=17106665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24362986A Granted JPS63100149A (ja) | 1986-10-14 | 1986-10-14 | 蒸着用Ｆｅ−Ｃｏ基合金 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63100149A (en]) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10116749A (ja) * | 1996-10-08 | 1998-05-06 | Sony Corp | 金属薄膜型磁気記録媒体用磁性材料の製造方法と金属薄膜型磁気記録媒体 |
| KR100494610B1 (ko) * | 1996-02-28 | 2005-09-08 | 미쓰비시 마테리알 가부시키가이샤 | 고유전체막형성용고밀도스퍼터링타겟 |
| JP2009167529A (ja) * | 2009-01-22 | 2009-07-30 | Sanyo Special Steel Co Ltd | 軟磁性ターゲット材 |
| JP2019534562A (ja) * | 2016-10-27 | 2019-11-28 | ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティ オブ アラバマ | Ｆｅ−Ａｌ系合金磁性薄膜 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60228637A (ja) * | 1984-04-25 | 1985-11-13 | Toshiba Corp | 磁気記録媒体用Ｃｏ基合金 |
-
1986
- 1986-10-14 JP JP24362986A patent/JPS63100149A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60228637A (ja) * | 1984-04-25 | 1985-11-13 | Toshiba Corp | 磁気記録媒体用Ｃｏ基合金 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100494610B1 (ko) * | 1996-02-28 | 2005-09-08 | 미쓰비시 마테리알 가부시키가이샤 | 고유전체막형성용고밀도스퍼터링타겟 |
| JPH10116749A (ja) * | 1996-10-08 | 1998-05-06 | Sony Corp | 金属薄膜型磁気記録媒体用磁性材料の製造方法と金属薄膜型磁気記録媒体 |
| JP2009167529A (ja) * | 2009-01-22 | 2009-07-30 | Sanyo Special Steel Co Ltd | 軟磁性ターゲット材 |
| JP2019534562A (ja) * | 2016-10-27 | 2019-11-28 | ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティ オブ アラバマ | Ｆｅ−Ａｌ系合金磁性薄膜 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0430451B2 (en]) | 1992-05-21 |
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